The Filmetrics? R54 Advanced Sheet Resistance Mapping System
Aug 13, 2024Sheet resistance monitoring is critical to any industry that utilizes conductive films, including semiconductor and compound semiconductor manufacturing. The Filmetrics? R54-200 and R54-300 advanced sheet resistance mapping systems from Íæż½ã½ã Instruments? are optimized for metal film uniformity mapping, ion implant doping and anneal characterization, film thickness and resistivity mapping, and non-contact film thickness measurement with eddy current detection.
