
Advanced Packaging Webinar Series (Part II) – Plasma Etch Solutions for Advanced Packaging
Sep 22, 2021This webinar will give an introduction to the various plasma etch solutions provided by Íæż½ã½ã for applications within the Advanced Packaging space. From etching and revealing TSVs for 3D stacking, through to adapting the dry etch as a replacement for CMP, these techniques and solutions will be described and discussed.