Positioning, Distance, Displacement, Run out, Autofocus, Nulling, Stage vibration, Media thickness
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Capacitive Sensors
_Íæż½ã½ã¡¯s portfolio of capacitive sensors enable detection and measurement of proximity, positioning, distance, displacement, run out, autofocus, nulling, vibrations and thickness. Our non-contact, low-noise, high-performance sensors are used by OEMs (semiconductor equipment, automated microscopy, automotive components, photovoltaic) and production end users (data storage, automotive drive train components) for a range of applications, including direct measurements of straightness and flatness of high precision machine tools and stages, and use as a position sensor for focal plane control. Our capacitive sensors also serve an array of industrial test and measurement, and research and development use cases.
MicroSense? Capacitive Sensors
Non-contact Position Measurement
MicroSense? capacitive sensors utilize innovative technology to achieve high-performance measurement capabilities. With down to picometer resolution, MicroSense capacitive sensors offer the lowest noise performance of any commercially available capacitive sensor. Several application-specific capacitive position sensors are available, with each optimized for either high stability and linearity or the highest measurement bandwidth for fast response.
All MicroSense capacitive sensors feature:
- Completely non-contact capacitive position measurement using accurate electrical sensing technology
- Detection of any conductive, grounded target with surface finish or material having no effect on accuracy
- Short measurement ranges, 10?m up to 4mm, depending on sensor size
MicroSense 4800 Series
A versatile, all-around position sensor designed for the best linearity and stability.
MicroSense 5800 Series
A high resolution sensor with measurement bandwidth up to 100kHz. Designed for high dynamic applications, these sensors reliably measure even poorly grounded targets such as air-bearing spindles and motors.
MicroSense 6800 Series
A ultra-low noise sensor with picometer resolution and a state-of-the-art design that provides high resolution with increased standoff from the sensor to the target.
MicroSense 8800 Series
A low noise sensor with sub-nanometer resolution and measurement bandwidth up to 20kHz, designed for best linearity and stability, and ideal for servo system position feedback and fast tool servo applications.
MicroSense Mini
A compact, cost effective, nano-positioning sensor for original equipment manufacturers, ideal for use in piezo-driven flexure stages and other short-travel nano-positioners.
MicroSense Spin Check Spindle Metrology System
System that supports measurement of repeatable run-out and non-repeatable run-out of hard disk drive spindle motors and other precision, rotating mechanisms.
MicroSense Sensors for Measurement in Vacuum Environments
Low out-gassing sensors that serve ultra-clean, high vacuum, and ultra-high vacuum applications.
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