Process Control
_Semiconductor process equipment manufacturers use Íæż½ã½ã¡¯s process control systems to understand process quality and to optimize tool performance. Used during process and tool development, Íæż½ã½ã¡¯s process control systems produce information used to visualize, diagnose and control process conditions ¨C enabling the equipment manufacturers to fully characterize and understand their tools¡¯ performance. Our inspection, metrology and in situ process monitoring solutions are also used to qualify process tool performance before shipment. Íæż½ã½ã¡¯s process control systems help equipment suppliers build reliable, production-worthy process tools.
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Process Control Products
Íæż½ã½ã¡¯s comprehensive portfolio of process control products for Chip Manufacturing also support development and production of process tools for the semiconductor ecosystem. Our products that support process equipment manufacturers include:
- Surfscan? unpatterned wafer inspection systems
- SensArray? in situ process monitoring solutions
- SpectraFilm? films metrology systems
- Axion? X-ray critical dimension (CD) and shape metrology system
- SpectraShape? optical critical dimension (CD) and shape metrology systems
- And more...
Learn about our products available for semiconductor process equipment manufacturers in our Defect Inspection and Review, Metrology and In Situ Process Management product categories.
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